Institute of Semiconductor Engineering

How is the teaching at the IHT structured?

ei-bauhaus stuttgart at the IHT...

Under the motto "Study - Workshop - Research & Development", the IHT participates in the  ei-bauhaus stuttgart as the "semiconductor workshop" and is responsible for the practical training of our students in the fields of semiconductor material synthesis, semiconductor process technology and semiconductor analytics.

continue to the ei-bauhaus stuttgart

Courses at the IHT...

The courses at IHT are divided into 4 lecture blocks. From the question "What is a semiconductor?" to the basic theory behind the quantum computer, the most important topics of semiconductor engineering are addressed in various lectures.

What is Microelectronics?

What is a semiconductor? What is a transistor? Why is silicon the industries material of choice or why are microelectronic devices an essential part of everyday life?

The lectures Microelectronics I, read by Prof. Jürgen Werner from IPV, and Microelectronics II, read by Prof. Jörg Schulze from IHT, address these and many other questions.

How does a semiconductor work?

What are the basic physical effects behind bipolar technology or field effect controlled devices? How exactly does a MOSFET, bipolar transistor or IGBT work?

To put it in a nutshell, the lectures Semiconductor Engineering I-IV deal with the question:

How do "classical" components work?

How is a component manufactured?

How do several billion transistors get on a chip? What exactly do the individual production steps look like? Or why can we now store hundreds of gigabytes on hard disks smaller than a credit card?

The lectures Semiconductor Technology I-III deal with the production of semiconductor devices of all kinds and the exact analysis of the processes involved. So the question is:

How are semiconductor components of all kinds manufactured?

What is quantum electronics?

What is quantum electronics anyway? How can we utilize quantum mechanical effects? How does a quantum computer works or what is quantum cryptography?

The lectures Quantum Electronics I and II give an insight into the complex world of quantum electronic phenomena and how they can be made usable.

In addition, the lecture Quantum Electronics Z covers selected chapters of higher physics in order to explain the theoretical basics of the described effects.

Qualification Work at IHT...

Whether they are doing their bachelor's, research or master's theses at IHT, our students gain an insight into the world of top-level research on some of the latest research topics in semiconductor engineering.

Supported by two supervisors and together with the entire institute team, the fundamentals of scientific work are to be deepened here.

Continue to the qualification work...

Colloquia at the IHT...

In its talks, the colloquium "Bauelemente und Technologien" (Components and Technologies) provides a "look beyond the end of the nose" of research at the IHT. Every semester we welcome numerous national and international speakers from industry and research to present their current research.

Continue to the colloquia...

Internships at IHT...

The main aim of the internship or the "Practical Lab Exercise" at the IHT is to familiarize our students with the practical work with semiconductor devices.

The small student groups produce their own components in close cooperation with the institute team. The group accompanies the entire process starting with the growth of the layers and the processing in the institute's own clean room to the measurement and evaluation of the individual components.

Classification in the curriculum

The "Internship (Bachelor): Semiconductor Technology - PDBFET" is part of the

  • "Internship (Master): Semiconductor Technology - Group IV Photonics"

to the laboratory cycle of the IHT. The internship is offered every second semester, always in the winter semester.

Recommended requirements

It is recommended that you have some knowledge of how to work in "Microelectronics" (ME), "Semiconductor Engineering - Bipolar Technology" (HL I) or "Semiconductor Technology - Process Technology" (HLT I).


The following contents will be discussed:


  1. Introduction to working in a clean room
  2. Introduction to statistics, error analysis and error calculation
  3. Manufacturing sequence of a PDBFET, functionality of a PDBFET and comparison with the structure of a long channel MOSFET.

Production of PDBFETs:

4. introduction to the growth of semiconductor layers by molecular beam epitaxy
5. carrying out selected manufacturing steps (structuring, evaporation and cleaning techniques) in a clean room environment, taking appropriate process control into account

Characterization of the manufactured PDBFETs:

6. metrological characterization by means of "On Wafer" measurement technology,
7. comparing the PDBFET characteristic with the characteristic of a conventional long channel MOSFET by measuring a commercial long channel MOSFET.

Learning Goals

The students

  • have basic practical knowledge of the production of a so-called "Planar-Doped Barrier MOSFET" (PDBFET), a vertical MOSFET with a channel length in the sub-10 nm range. 
  • They can explain the basic function of a PDBFET, know its characteristics and can compare them with the characteristics of a long channel MOSFET.
  • They have first knowledge about so-called short channel effects of modern MOSFETs and know how they are suppressed in a PDBFET.
  • They can work independently in the clean room and laboratories of the IHT and carry out the electrical characterization of a PDBFET independently. This includes the derivation of secondary and ternary data from the measured primary data (raw data).
  • They will learn the basics of error observation and estimation, recognize random and systematic measurement errors and understand the principle of error propagation.
  • In addition, they are familiar with the rules and principles of protocolling scientific experiments and learn to keep a laboratory book.


The IHT can offer 2 x 4 internships per semester (2 internship groups).

The registration period for the two internship groups starts on Monday, 01.10. and ends on Sunday, 21.10. The internship then starts for both groups with the introduction on Thursday, 25.10., 13:00 in the IHT seminar room 1.444 (ETI-II building).

Due to the limited number of internships, a selection is made according to the following hierarchical criteria in the event of overbooking:

  1. Preference is given to students of the Bachelor's programme "Electrical Engineering and Information Technology" in the specialisation "Micro-, Opto- and Nanoelectronics"
  2. Preference is given to students in higher semesters
  3. "First come, first serve."

Further information and registration can be found at C@MPUS under course number 371203810.

Contact for further questions

In this practical course everything revolves around the photonic transmission path.

This course is currently running and will be offered again in summer semester 2020.

PhD at the IHT

What comes after studying? A dissertation offers numerous opportunities and chances to deal more intensively and independently with a specific question.

For further information on the exciting topic of PhD at the IHT, please contact Dr. Oehme.


This image shows Michael Oehme

Michael Oehme


Academic Senior Counsellor
Vice Director

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