| Zeit: | 18. Dezember 2018, 14:00 – 15:30 Uhr |
|---|---|
| Veranstaltungsort: | Universität Stuttgart Institut für Halbleitertechnik Seminarraum des IHTs - Raum 1.444 Pfaffenwaldring 47 70569 Stuttgart Telefon: +49 711 685 68003 |
| Download als iCal: |
|
Am Dienstag den 18. Dezember setzt sich das IHT-Kolloquium fort, es spricht:
Prof. Dr. Stefano Chiussi
Departamento Física Aplicada
Universidade de Vigo
Spanien
zum Thema:
„193 nm Excimer Laser Processing of Group IV Semiconductors, Biomaterials and Substrates”
Abstract
193 nm Excimer lasers are commercial tools emitting powerful UV radiation, useful or processing a large variety of materials for different applications in semiconductor as well as in biomedical sectors. The talk “193 nm Excimer Laser processing of group IV semiconductors, biomaterials, and flexible substrates” will start with a brief introduction to the basics principles of these Laser types and explain their benefits, drawbacks or challenges, if used as processing tools. The required minimum experimental Set-Ups will be shown and the interaction of this UV radiation with matter explained. Typical processes for developing new semiconductors, biomaterials and biomedical devices at the “New Materials Group” and related results will be presented.