Our work on polarity control of WSe₂ for flexible CMOS inverters has now been published. We developed a new WOx seed layer approach for ALD top-gates leading to well-behaved unipolar p-channel WSe₂ FETs with enhancement-mode operation and good on/off ratios.
This allows us to present a strategy to tune the polarity of flexible top-gated FETs using evaporated WOₓ seed layers for p-channels and Al seed layers for n-channels, and demonstrate flexible WSe₂ CMOS inverters
