 |
|
 |
Institute for Semiconductor Engineering |
|
Overview |
|
|
|
|
|
|
|
|
|
|
Semiconductor engineering enables the production of electronic and optoelectronic
devices (diodes, transistors) and their integration to IC’s.
The IHT works through teaching and research on the fundamental and materials
aspects of semiconductor technology. This includes the role of electronic devices
and modern developments, the production of semiconductor devices and circuits,
which are based on lateral and vertical structuring in a planar technology,
as well as the potential ways with the transition from today's microelectronics
to future nano-electronics. With lectures, exercises, practical courses,
undergraduate and graduate projects (diplomas) a broad range of training is offered,
which ranges from the acquisition of a basic knowledge of semiconductor engineering,
to in-depth knowledge of current practices in research areas of material growth
(molecular beam epitaxy), and device structures (heterostucture devices and integrated
microsystems). |
|
The research work of the institute concentrates on the transition from today's microelectronics
to future nano-electronics with new manufacturing processes (molecular beam epitaxy MBE,
see picture) and production engineering (self organization), exploitation of quantum
effects in appropriately sized devices, and integration into practical circuits for mm-waves
and infrared applications.
A molecular beam epitaxy system for the production of silicon germanium heterostructure
devices on Si substrates has been designed and developed. The processes for the production
of devices and integrated circuits from such heterostructures are carried out in a recently
commisioned research cleanroom.
|
| |
